刘昶时, 刘慧英. XPS深度剖析的表征[J]. Journal of Xinjiang University (Natural Science Edition in Chinese and English), 1993, (1).DOI:
XPS深度剖析的表征
摘要
本文基于XPS深度剖析的实验结果
提出了两种不依赖于XPS谱议灵敏度因子的XPS深度剖析实验结果的表征方法
并将此二法与其它三种XPS深度剖析表征法进行了比较。
Abstract
Based on the experimental results of depth-dissection by XPS
two new quantitative ways
which are used to express the result of depth-dissection
independent of sensibility factor of element are advanced and they are compared with another three methods to denote profile of interface in this paper.