The paper presents the depth-concentration distribution of 20keV Titanium ions implanted into dry seeds of cotton and peanut measured by SEM-EDS. The measured results show that depth-concentration distribution is a non-symmetry Gaussian distribution with a long tail and maximum penetration depths of 20keV Titanium ions implanted into seeds of cotton and peanut are about 21 μm and 36μm .The mechanism of the induced mutation to the plant progeny is discussed.