多孔硅-PMMA/DR1复合膜制备方法的研究(英文)

贾振红; 涂楚辙

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多孔硅-PMMA/DR1复合膜制备方法的研究(英文)

研究精粹 | 更新时间：2026-01-21

- 多孔硅-PMMA/DR1复合膜制备方法的研究(英文)
- 多孔硅-PMMA/DR1复合膜制备方法的研究(英文)
- 新疆大学学报（自然科学版中英文） 2007年106卷第2期页码：134-138
- 作者机构：
  
  新疆大学信息科学与工程学院,新疆大学信息科学与工程学院新疆乌鲁木齐830046,新疆,乌鲁木齐,830046
- 作者简介：
- 基金信息：
  
  Supported by Program for New Century Excellent Talents in University of the P.R.China(Grant number:NCET-05-0897);Scientific Research Project for Universities in Xinjiang(Grant number:XJEDU2004E02 and XJEDU2006I10).
- DOI：
  中图分类号： TN304.05
- 纸质出版：2007
- 稿件说明：
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[1]贾振红,涂楚辙.多孔硅-PMMA/DR1复合膜制备方法的研究(英文)[J].新疆大学学报(自然科学版),2007,No.106(02):134-138+143.

贾振红, 涂楚辙. 多孔硅-PMMA/DR1复合膜制备方法的研究(英文)[J]. Journal of Xinjiang University (Natural Science Edition in Chinese and English), 2007, 106(2): 134-138.
[1]贾振红,涂楚辙.多孔硅-PMMA/DR1复合膜制备方法的研究(英文)[J].新疆大学学报(自然科学版),2007,No.106(02):134-138+143. DOI：

贾振红, 涂楚辙. 多孔硅-PMMA/DR1复合膜制备方法的研究(英文)[J]. Journal of Xinjiang University (Natural Science Edition in Chinese and English), 2007, 106(2): 134-138. DOI：

摘要

报道了用电化学腐蚀法结合激光干涉或聚合物掩膜制备多孔硅通道波导、定向耦合器、波导棱镜、光栅耦合器和激光诱导动态光栅等光子器件

并给出了这些多孔硅光波导器件的性能参数

研究结果表明可利用多孔硅开发出新的全硅光电子器件.

Abstract

Porous silicon buried channel optical waveguides

waveguide directional coupler

waveguides prism

grating coupler and laser-induced dynamic grating fabricated by electrochemical anodisation method assisted by laser beams interference or polymer masking have been reported in this paper.The properties of these optical waveguide devices bave been analyzed.The experimental results show that porous silicon can be used to develop new all-silicon optoelectronic integrated devices.

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references

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Jia Z H,Tu C Z,Zhou J,et al.Simpler method to fabricate buried channel optical waveguides based on porous silicon[J].SPIE,2003,5116:751-755.

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Jia Z H,Tu C Z,Delimurat Tusun,et al.The waveguide directional coupler of oxidized porous silicon fabricated byelectrochemical anodisation process[J].LASER JOURNAL,2005,26(1):11-12.

Jia Zhenhong.The experimental study of waveguide prism based on porous silicon[J].Semiconductor Photonics andTechnology,2004,10(1):28-30.

Jia Z H,Tu C Z,Delimurat Tusun.Grating Coupler of Oxidized Porous Silicon[J].Journal of Optoelectronics L aser,2004,15(5):534-436.

Jia Zhenhong.The self-diffraction in Porous Silicon/PMMA-DR1Composite Films[J].Semiconductor Photonics andTechnology,2006,12(1):18-20.

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