近距离升华薄膜装置的研制及特性

陈树义; 郑毓峰; 简基康; 李东来; 马忠权

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近距离升华薄膜装置的研制及特性

更新时间：2026-01-21

- 近距离升华薄膜装置的研制及特性
- Journal of Xinjiang University (Natural Science Edition in Chinese and English) Issue 4, (2001)
- 作者机构：
  
  新疆大学物理系,新疆大学物理系,新疆大学物理系,新疆大学物理系,新疆大学物理系新疆乌鲁木齐830046 ,新疆乌鲁木齐830046 ,新疆乌鲁木齐830046 ,新疆乌鲁木齐830046,新疆,乌鲁木齐,830046
- 作者简介：
- 基金信息：
- DOI：
  CLC： TM914
- Published：2001
- 稿件说明：
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[1]陈树义,郑毓峰,简基康,李东来,马忠权.近距离升华薄膜装置的研制及特性[J].新疆大学学报(理工版),2001(04):388-392.

陈树义, 郑毓峰, 简基康, et al. 近距离升华薄膜装置的研制及特性[J]. Journal of Xinjiang University (Natural Science Edition in Chinese and English), 2001, (4).
[1]陈树义,郑毓峰,简基康,李东来,马忠权.近距离升华薄膜装置的研制及特性[J].新疆大学学报(理工版),2001(04):388-392. DOI：

陈树义, 郑毓峰, 简基康, et al. 近距离升华薄膜装置的研制及特性[J]. Journal of Xinjiang University (Natural Science Edition in Chinese and English), 2001, (4). DOI：

摘要

详细介绍了近距离升华 (CSS)薄膜装置的研制及其特性 .并对利用该装置及利用射频溅射沉积的 Cd Te膜的结构进行了 XRD分析 .结果表明

CSS方法所得 Cd Te膜具有较大的晶粒尺度

结晶效果更好 .

Abstract

The Close-Space-Sublimation(CSS)deposition is the most prospective method to fabricate highly efficient CdTe films at present. The fabrication of Close-Space-Sublimation system is described in detail in this paper. The structural property of CdTe films deposited on ITO/GLASS is analyzed by means of XRD. The analysis result indicates the CSS samples have bigger crystal radius than that of sputtering samples.

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references

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