郑毓峰, 陈树义, 李锦, et al. 共溅射CdTe掺Nd薄膜的结构和电导性能[J]. Journal of Xinjiang University (Natural Science Edition in Chinese and English), 2002, (1).DOI:
共溅射CdTe掺Nd薄膜的结构和电导性能
摘要
采用共溅射法在 ITo/玻璃基片上沉积 Cd Te掺 Nd薄膜
并利用 XRD和阻抗测试研究薄膜的结构和电导性能 .结果表明
适当 Nd掺入可以改善 Cd Te薄膜结晶特征和电导性能
Abstract
Nd doped CdTe thin films have been fabricated on ITO/glass substrate by using Co sputtering deposition. The structural and conductive properties of films have been investigated by X ray diffraction (XRD) and impedance measurements. The results show that proper doping of Nd can improve crystallinity and conductivity of CdTe films.