BaTiO-3 thin film were prepared on Si(100) substract by solgel technique using ethylene glycol monomethyl ether as solevnt

barium acetate and titanium tetrabutoxide as precursor.Xray diffraction were used to study structure

it shows that the polycrystalline BaTiO-3 thin film with some orientation were obtained.Their dielectric properties were measured

and the effect of the increasing crystalline temperature on the property were observed

that is increasing the capatiancy of the thin film.