掺杂单晶硅纳米梁的谐振频率特性

吕焕玲; 王静

doi:10.13568/j.cnki.651094.2016.04.009

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掺杂单晶硅纳米梁的谐振频率特性

更新时间：2026-01-21

- 掺杂单晶硅纳米梁的谐振频率特性
- Journal of Xinjiang University (Natural Science Edition in Chinese and English) Vol. 33, Issue 4, Pages: 421-426(2016)
- 作者机构：
  
  新疆大学物理科学与技术学院
- 作者简介：
- 基金信息：
- DOI：10.13568/j.cnki.651094.2016.04.009
  CLC： O327
- Published：2016
- 稿件说明：
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[1]吕焕玲,王静.掺杂单晶硅纳米梁的谐振频率特性[J].新疆大学学报(自然科学版),2016,33(04):421-426.
[1]吕焕玲,王静.掺杂单晶硅纳米梁的谐振频率特性[J].新疆大学学报(自然科学版),2016,33(04):421-426. DOI： 10.13568/j.cnki.651094.2016.04.009.

DOI：10.13568/j.cnki.651094.2016.04.009.

摘要

掺杂有利于提高单晶硅纳米材料的力学性能.本文主要通过分子动力学方法研究了掺杂浓度和尺寸对纳米单晶硅梁谐振频率的影响

结果表明:谐振频率随着单晶硅纳米梁掺杂浓度的增大而增大

但值变化很小

对梁的谐振频率影响并不明显;同时

谐振频率随着单晶硅纳米梁长度尺寸的增大而减小

随着单晶硅纳米梁厚度尺寸的增大而增大.由此可以得出结论:掺杂浓度会影响纳米单晶硅梁的谐振频率

但是影响较小

而影响其谐振频率的主要因素是纳米单晶硅梁的尺寸.

Abstract

Doping is beneficial to improve the physical properties of silicon nano-materials.This paper studies the effects of doping concentration and size on the resonant frequency of monocrystalline silicon nanobeam by molecular dynamics method.The results show that the resonance frequency of the beam increases with the increase of the doping concentration of monocrystalline silicon nano-beam

and the change of the resonant frequency is not obvious.The resonant frequency decreases with the increases of the length.And the resonant frequency increases with the increase of the thickness of monocrystalline silicon nano-beam.It can be concluded that the doping concentration has a minor influence on the resonance frequency of monocrystalline silicon nano-beam.The size of monocrystalline silicon nano-beam is the main reason of that.

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